Table 5: Summary Statistics for 1 mA horizontal and vertical sense lines
Figure 10a
Figure 10b
Figure 10c
Figure 10d
Figure 10e
Figure 10f
Figure 11a
Figure 11b
Figure 11c
Figure 11d
Table 5 is a summary of the delogged data for the horizontal and vertical sense lines. Erroneous data points (datalogger errors were removed). Six of the 12 data sets for the 1 mA lines are shown. These lines were driven with a constant 1 mA current source. The North/South line had zero programmed antifuses; the East/West line had 1 programmed antifuse. Horizontal and vertical refer to the substrate orientation of the sense line; the horizontal sense line traverses the MCM in the x-direction, and the vertical sense line traverses the MCM in the y-direction. The reference designations of VT or HT refer to horizontal and vertical sense lines. ‘1C’ and ‘2C’ are the 125 C devices, ‘1B’ and ’2B’ are the 85 C devices and ‘1A’ and ‘2A’ are the 25 C devices. Statistica and Excel were used for the statistical data processing. See figures 10a-f. Some of the variability of the data is due to variations in chamber temperature. Figures 11a-d are plots of the datalogged actual temperatures versus the responses of the vertical and horizontal temp sense lines for 39 consecutive days starting 10/18/95. This data demonstrates the need to account for the temperature sensitivity if precision voltage or current sources are to be used. or any application where a precise line resistance or impedance is required.